BULK SILICIDES AND SI-METAL INTERFACE REACTION - PD2SI

被引:39
|
作者
FRANCIOSI, A [1 ]
WEAVER, JH [1 ]
机构
[1] UNIV WISCONSIN, CTR SYNCHROTRON RADIAT, STOUGHTON, WI 53589 USA
关键词
D O I
10.1103/PhysRevB.27.3554
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:3554 / 3561
页数:8
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