PERIPHERAL ELECTRON-BEAM INDUCED CURRENT RESPONSE OF A SHALLOW P-N-JUNCTION

被引：18

|

作者：

HOLLOWAY, H

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 10期

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D O I：

10.1063/1.332917

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：3669 / 3675

页数：7

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