PERIPHERAL ELECTRON-BEAM INDUCED CURRENT RESPONSE OF A SHALLOW P-N-JUNCTION

被引：18
|
作者：
HOLLOWAY, H
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 10期
关键词：
D O I：
10.1063/1.332917
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3669 / 3675
页数：7
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