INFLUENCE OF THE VELOCITY OF GAS-MIXTURE CURRENT AND CHLORINE CONCENTRATION ON TELLURIUM CAPTURE AT THE GAS EPITAXY OF GAAS

被引：0
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作者：
LAVRENTYEVA, LG
TOROPOV, SE
POROKHOVNICHENKO, LP
机构：
来源：
IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA | 1982年 / 25卷 / 11期
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O4 [物理学];
学科分类号：
0702 ;
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页码：18 / 21
页数：4
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