LARGE-NUMERICAL-APERTURE MICROLENS FABRICATION BY ONE-STEP ETCHING AND MASS-TRANSPORT SMOOTHING

被引：36

作者：

LIAU, ZL ^{[1
]}

MULL, DE ^{[1
]}

DENNIS, CL ^{[1
]}

WILLIAMSON, RC ^{[1
]}

WAARTS, RG ^{[1
]}

机构：

[1] SDL INC,SAN JOSE,CA 95134

来源：

APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 12期

关键词：

D O I：

10.1063/1.111892

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Precision f/1 microlenses have been fabricated in GaP by smoothing a multiple-mesa structure etched with a designed width and length variation. High-resolution lithography and ion-beam-assisted etching were used for mesa definition and resulted in accurate lens profiles after mass-transport smoothing at 900-1070-degrees-C. This much simplified fabrication technique is highly promising for efficient, diffraction-limited micro-optical elements.

引用

页码：1484 / 1486

页数：3

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