LARGE-NUMERICAL-APERTURE MICROLENS FABRICATION BY ONE-STEP ETCHING AND MASS-TRANSPORT SMOOTHING

被引:36
|
作者
LIAU, ZL [1 ]
MULL, DE [1 ]
DENNIS, CL [1 ]
WILLIAMSON, RC [1 ]
WAARTS, RG [1 ]
机构
[1] SDL INC,SAN JOSE,CA 95134
关键词
D O I
10.1063/1.111892
中图分类号
O59 [应用物理学];
学科分类号
摘要
Precision f/1 microlenses have been fabricated in GaP by smoothing a multiple-mesa structure etched with a designed width and length variation. High-resolution lithography and ion-beam-assisted etching were used for mesa definition and resulted in accurate lens profiles after mass-transport smoothing at 900-1070-degrees-C. This much simplified fabrication technique is highly promising for efficient, diffraction-limited micro-optical elements.
引用
收藏
页码:1484 / 1486
页数:3
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