SILICONE POLYMERIZATION BY GLOW-DISCHARGE APPLICATION

Polymerization of hexamethyldisiloxane (HMDS) on aluminum by application of capacitively coupled plasma was carried out under different polymerization conditions. The effect of applied frequency, power, and discharge duration on polymerization rate was investigated. Film adhesion was found to be directly related to applied frequency and power. Polymer deposits were examined with SEM and ATR, and the effect of the coat on wettability was sought by measuring the contact angles. The chemical structure of the coat was affected by the energy density applied during coat preparation.