PLASMA POLYMERIZATION OF TETRAMETHYLDISILOXANE BY A MAGNETRON GLOW-DISCHARGE

被引：24
|
作者：
SHARMA, AK
YASUDA, H
机构：
[1] UNIV MISSOURI,DEPT CHEM ENGN,ROLLA,MO 65401
[2] UNIV MISSOURI,GRAD CTR MAT RES,ROLLA,MO 65401
来源：
THIN SOLID FILMS | 1983年 / 110卷 / 02期
关键词：
D O I：
10.1016/0040-6090(83)90221-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：171 / 184
页数：14
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