CHARACTERIZATION OF ELECTRICAL-PROPERTIES OF OXYGEN HYDROGEN RICH SILICON-NITRIDE FILMS FOR MNOS DEVICES

被引：0
|
作者：
XU, D [1 ]
KAPOOR, VJ [1 ]
机构：
[1] UNIV CINCINNATI,DEPT ELECT & COMP ENGN,ELECTR DEVICES & MAT RES LAB,CINCINNATI,OH 45221
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C361 / C361
页数：1
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