ORIGINS OF STRESS-INDUCED PERPENDICULAR MAGNETIC-ANISOTROPY OF SPUTTERED IRON-OXIDE THIN-FILMS

被引：9

作者：

LIN, JK ^{[1
]}

SIVERTSEN, JM ^{[1
]}

JUDY, JH ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT ELECT ENGN,MINNEAPOLIS,MN 55455

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1986年 / 22卷 / 05期

关键词：

MAGNETIC MATERIALS - Stresses;

D O I：

10.1109/TMAG.1986.1064581

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

CoCr-doped gamma - Fe//2 O//3 thin films prepared by RF sputtering and annealing processes exhibit stress-induced perpendicular magnetic anisotropy. The stress is found to be caused by both the ion bombardment on the film surface during sputter-deposition and the lattice misfit between the film and the substrate. Thermal effects play a less important role in causing stress in the films examined in this study.

引用

页码：594 / 596

页数：3

共 50 条

[21] THE MAGNETIC-ANISOTROPY IN THE INITIAL LAYER OF CO-CR SPUTTERED THIN-FILMS
NIIMURA, Y
NAKAGAWA, S
HOSHI, Y
NAOE, M
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (05) : 2461 - 2463
[22] THE MICROSTRUCTURE OF IRON-OXIDE THIN-FILMS
HWANG, CG
CHEN, MM
CASTILLO, G
JOURNAL OF APPLIED PHYSICS, 1988, 63 (08) : 3272 - 3274
[23] THE TOPOGRAPHY OF IRON-OXIDE THIN-FILMS
ZHOU, ZJ
YAN, JJ
JOURNAL OF APPLIED PHYSICS, 1991, 69 (08) : 5766 - 5766
[24] COLUMNAR MICROSTRUCTURE AND MAGNETIC-ANISOTROPY IN THIN-FILMS
ANDRA, W
DANAN, H
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 56 (02): : K145 - K148
[25] COMPOSITIONAL VARIATIONS IN DOPED IRON-OXIDE MAGNETIC THIN-FILMS
HERMSMEIER, B
BRUNDLE, CR
BAGLIN, JEE
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05): : 2864 - 2868
[26] EFFECT OF HEAT-TREATMENT ON REACTIVELY SPUTTERED IRON-OXIDE THIN-FILMS
LIN, JK
SIVERTSEN, JM
JUDY, JH
JOURNAL OF APPLIED PHYSICS, 1985, 57 (08) : 4000 - 4002
[27] PROPERTIES OF RF SPUTTERED IRON-OXIDE THIN-FILMS WITH COCR AND NB AS DOPANTS
LIN, JK
SIVERTSEN, JM
JUDY, JH
IEEE TRANSACTIONS ON MAGNETICS, 1985, 21 (05) : 1462 - 1464
[28] STUDY OF THE COERCIVE POWER OF RF-SPUTTERED IRON-OXIDE THIN-FILMS
YU, M
YOU, GJ
ZHOU, ZJ
LUO, HL
CHINESE PHYSICS, 1988, 8 (03): : 593 - 601
[29] ELECTRICAL-RESISTIVITY OF RF-SPUTTERED IRON-OXIDE THIN-FILMS
MEI, Y
ZHOU, ZJ
LUO, HL
JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) : 4388 - 4389
[30] FERROMAGNETIC-RESONANCE AND SPIN ANISOTROPY IN IRON-OXIDE THIN-FILMS AND IRON-OXIDE NICKEL-OXIDE SUPERLATTICES
KREBS, JJ
LIND, DM
BERRY, SD
JOURNAL OF APPLIED PHYSICS, 1993, 73 (10) : 6457 - 6459

← 1 2 3 4 5 →