MICROSTRUCTURE AND ELECTRICAL-CONDUCTIVITY OF PLASMA DEPOSITED GOLD FLUOROCARBON COMPOSITE FILMS

被引：5

作者：

PERRIN, J ^{[1
]}

DESPAX, B ^{[1
]}

HANCHETT, V ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LABS,SAN JOSE,CA 95193

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573323

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：823 / 824

页数：2

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