MICROSTRUCTURE AND ELECTRICAL-CONDUCTIVITY OF PLASMA DEPOSITED GOLD FLUOROCARBON COMPOSITE FILMS

被引：5
|
作者：
PERRIN, J [1 ]
DESPAX, B [1 ]
HANCHETT, V [1 ]
KAY, E [1 ]
机构：
[1] IBM CORP,RES LABS,SAN JOSE,CA 95193
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573323
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：823 / 824
页数：2
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