MICROSTRUCTURE AND ELECTRICAL-CONDUCTIVITY OF PLASMA DEPOSITED GOLD FLUOROCARBON COMPOSITE FILMS

被引：5

|

作者：

PERRIN, J ^{[1
]}

DESPAX, B ^{[1
]}

HANCHETT, V ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LABS,SAN JOSE,CA 95193

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573323

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：823 / 824

页数：2

相关论文

共 50 条

[1] MICROSTRUCTURE AND ELECTRICAL-CONDUCTIVITY OF PLASMA DEPOSITED GOLD FLUOROCARBON COMPOSITE FILMS
PERRIN, J
DESPAX, B
HANCHETT, V
KAY, E
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (01): : 46 - 51
[2] ELECTRICAL-CONDUCTIVITY OF OBLIQUELY DEPOSITED THIN TELLURIUM-FILMS
JAIN, IP
THAKUR, DK
GARG, JC
INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1975, 13 (07) : 432 - 436
[3] ANISOTROPY OF ELECTRICAL-CONDUCTIVITY IN TELLURIUM THIN-FILMS OBLIQUELY DEPOSITED
CRISTEA, P
REVUE ROUMAINE DE PHYSIQUE, 1975, 20 (05): : 527 - 529
[4] ELECTRICAL-CONDUCTIVITY OF NONIDEAL PLASMA
NORMAN, GE
VALUEV, AA
PLASMA PHYSICS AND CONTROLLED FUSION, 1979, 21 (06) : 531 - 544
[5] ELECTRICAL-CONDUCTIVITY OF A CESIUM PLASMA
SECHENOV, VA
SON, EE
SHCHEKOTOV, OE
HIGH TEMPERATURE, 1977, 15 (02) : 346 - 349
[6] COMPUTATION OF ELECTRICAL-CONDUCTIVITY IN A PLASMA
CHEN, RLW
PLASMA PHYSICS AND CONTROLLED FUSION, 1979, 21 (08) : 747 - 748
[7] ELECTRICAL-CONDUCTIVITY OF CESIUM PLASMA
CHRISTOPOULOS, C
PHYSICS LETTERS A, 1979, 71 (2-3) : 227 - 230
[8] ELECTRICAL-CONDUCTIVITY AND MICROSTRUCTURE OF METAL CONTAINING A-C-H FILMS
BENNDORF, C
BOETTGER, E
FRYDA, M
HAUBOLD, HG
KLAGES, CP
KOBERLE, H
SYNTHETIC METALS, 1991, 43 (03) : 4055 - 4058
[9] ELECTRICAL-CONDUCTIVITY OF NONIDEAL PLASMA
WILHELM, HE
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1981, 9 (02) : 68 - 73
[10] ELECTRICAL-CONDUCTIVITY AND MAGNETOCONDUCTIVITY OF SINGLE-CRYSTAL GOLD-FILMS
HABERMEIER, HU
THIN SOLID FILMS, 1985, 126 (1-2) : 161 - 166

← 1 2 3 4 5 →