MECHANISM OF RADIATION-INDUCED CROSSLINKING AND CHAIN SCISSION IN RESIST POLYMERS

被引：0
|
作者：
TABATA, Y [1 ]
TAGAWA, S [1 ]
WASHIO, M [1 ]
HAYASHI, S [1 ]
机构：
[1] UNIV TOKYO,FAC ENGN,BUNKYO KU,TOKYO 113,JAPAN
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1984年 / 187卷 / APR期
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：95 / POLY
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