MECHANISM OF RADIATION-INDUCED CROSSLINKING AND CHAIN SCISSION IN RESIST POLYMERS

被引：0

作者：

TABATA, Y ^{[1
]}

TAGAWA, S ^{[1
]}

WASHIO, M ^{[1
]}

HAYASHI, S ^{[1
]}

机构：

[1] UNIV TOKYO,FAC ENGN,BUNKYO KU,TOKYO 113,JAPAN

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1984年 / 187卷 / APR期

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：95 / POLY

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