CHEMICAL SPUTTERING BY IONS, ELECTRONS AND PHOTONS

被引：0

作者：

OOSTRA, DJ

DEVRIES, AE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 18卷 / 4-6期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：618 / 624

页数：7

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