CHEMICAL SPUTTERING BY IONS, ELECTRONS AND PHOTONS

被引：0
|
作者：
OOSTRA, DJ
DEVRIES, AE
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 18卷 / 4-6期
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中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
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页码：618 / 624
页数：7
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