LAYER-BY-LAYER DESIGN METHOD FOR SOFT-X-RAY MULTILAYERS

A new design method effective for a nontransparent system has been developed for soft-x-ray multilayers with the aid of graphic representation of the complex amplitude reflectance in a Gaussian plane. The method provides an effective means of attaining the absolute maximum reflectance on a layer-by-layer basis and also gives clear insight into the evolution of the amplitude reflectance on a multilayer as it builds up. An optical criterion is derived for the selection of a proper pair of materials needed for designing a high-reflectance multilayer. Some examples are given to illustrate the usefulness of this design method.