LAYER-BY-LAYER DESIGN METHOD FOR SOFT-X-RAY MULTILAYERS

被引：75
|
作者：
YAMAMOTO, M
NAMIOKA, T
机构：
[1] Research Institute for Scientific Measurements, Tohoku University, Sendai, 980, 2-1-1 Katahira, Aoba-ku
[2] Optical Research Section, NASA Goddard Space Flight Center, Greenbelt, MD, 20771
来源：
APPLIED OPTICS | 1992年 / 31卷 / 10期
关键词：
X-RAYS; MULTILAYER MIRROR; THIN FILMS;
D O I：
10.1364/AO.31.001622
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new design method effective for a nontransparent system has been developed for soft-x-ray multilayers with the aid of graphic representation of the complex amplitude reflectance in a Gaussian plane. The method provides an effective means of attaining the absolute maximum reflectance on a layer-by-layer basis and also gives clear insight into the evolution of the amplitude reflectance on a multilayer as it builds up. An optical criterion is derived for the selection of a proper pair of materials needed for designing a high-reflectance multilayer. Some examples are given to illustrate the usefulness of this design method.
引用
收藏
页码：1622 / 1630
页数：9
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