LOW-POWER MULTI-PULSE LASER ANNEALING OF ALPHA-GE

被引:2
|
作者
VITALI, G [1 ]
ZAMMIT, U [1 ]
MARINELLI, M [1 ]
BERTOLOTTI, M [1 ]
机构
[1] UNIV ROME,FAC INGN,IST FIS,I-00185 ROME,ITALY
来源
关键词
D O I
10.1007/BF00620535
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:161 / 167
页数:7
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