LOW-POWER MULTI-PULSE LASER ANNEALING OF ALPHA-GE

被引：2
|
作者：
VITALI, G [1 ]
ZAMMIT, U [1 ]
MARINELLI, M [1 ]
BERTOLOTTI, M [1 ]
机构：
[1] UNIV ROME,FAC INGN,IST FIS,I-00185 ROME,ITALY
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1983年 / 30卷 / 03期
关键词：
D O I：
10.1007/BF00620535
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：161 / 167
页数：7
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