MATHEMATICAL-DESCRIPTION OF MACROKINETICS OF SILICON DEPOSITION FROM GAS-PHASE

被引：0
|
作者：
GAYEV, EA
ASATURYAN, AS
MALOROSSIYANOV, VS
DEVYATKIN, BD
机构：
来源：
RUSSIAN METALLURGY | 1976年 / 03期
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中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
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页码：49 / 53
页数：5
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