ALLOYING OF SILICON EPITAXIAL LAYERS, PRECIPITATED FROM A GAS-PHASE

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作者：

GUREVICH, VM

KARPOVA, MI

MOSKALEV, LL

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来源：

ZHURNAL FIZICHESKOI KHIMII | 1983年 / 57卷 / 09期

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中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

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页码：2305 / 2309

页数：5

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