CALCULATION OF THE PROFILES OF APPEARING SUB-MICRON ELEMENTS DURING X-RAY-LITHOGRAPHY

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作者：
LABUNOV, VA
SHEPUREV, SY
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DOKLADY AKADEMII NAUK BELARUSI | 1989年 / 33卷 / 03期
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O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
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07 ; 0710 ; 09 ;
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页码：215 / 217
页数：3
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