Development of the RF Ion Sources for Focused Ion Beam Accelerators

被引：0

作者：

Voznyi, V. ^{[1
]}

Miroshnichenko, V. ^{[1
]}

Mordyk, S. ^{[1
]}

Shulha, D. ^{[1
]}

Storizhko, V. ^{[1
]}

Tokman, V. ^{[1
]}

机构：

[1] Natl Acad Sci, Inst Appl Phys, 58 Petropavlovskaya Str, UA-40000 Sumy, Ukraine

来源：

JOURNAL OF NANO- AND ELECTRONIC PHYSICS | 2013年 / 5卷 / 04期

关键词：

RF ion source; Plasma; Inductive; Helicon; Multicusp; Sputtering;

D O I：

暂无

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The paper presents the results of investigations of ion sources developed in the IAP of NAS of Ukraine for generation of high brightness ion beams with small energy spread. A series of RF ion sources operated at the frequency of 27.12 MHz were studied: the inductive RF ion source, the helicon ion source, the multicusp RF ion source, and the sputter type RF source of metal ions. A global model and transformer model were applied for calculation of RF source plasma parameters. Ion energy spread, ion mass, and ion current density of some sources were measured in the wide range of RF power, extraction voltage and gas pressure.

引用

页数：6

共 50 条

[21] LIQUID-METAL ION SOURCES AND APPLICATIONS IN FOCUSED ION-BEAM SYSTEMS
CORELLI, JC
HIGUCHIRUSLI, R
BALAKRISHNAN, S
LIEBMANN, L
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03): : 936 - 936
[22] Boron liquid metal alloy ion sources for special focused ion beam applications
Bischoff, Lothar
Klingner, Nico
Mazarov, Paul
Pilz, Wolfgang
Meyer, Fabian
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020, 38 (04):
[23] Investigation of NanoSQUIDs Fabricated with a Range of Focused Ion Beam Sources
Polychroniou, E.
Gallop, J.
Godfrey, T.
Cox, D.
Long, G.
Chen, J.
Romans, E.
Hao, L.
14TH EUROPEAN CONFERENCE ON APPLIED SUPERCONDUCTIVITY (EUCAS2019), 2020, 1559
[24] APPLICATION OF RF SUPERCONDUCTIVITY TO HIGH-BRIGHTNESS ION-BEAM ACCELERATORS
DELAYEN, JR
BOHN, CL
ROCHE, CT
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 56-7 : 1025 - 1028
[25] Development of multiple beam guns for high power RF sources for accelerators and colliders
Ives, RL
Miram, G
Krasnykh, A
Ivanov, V
Marsden, D
Mizuhara, M
Robinson, T
Wilcox, R
Guevara, J
HIGH ENERGY DENSITY AND HIGH POWER RF, 2003, 691 : 90 - 99
[26] Beam divergence of RF negative hydrogen ion sources for fusion
Wimmer, C.
Barnes, M.
Den Harder, N.
Navarro, A.
Nocentini, R.
Orozco, G.
Wunderlich, D.
Heinemann, B.
Fantz, U.
Serianni, G.
Veltri, P.
20TH INTERNATIONAL CONFERENCE ON ION SOURCES, 2024, 2743
[27] Ion sources for fission fragment accelerators
Koster, U
Kester, O
Habs, D
REVIEW OF SCIENTIFIC INSTRUMENTS, 1998, 69 (03): : 1316 - 1321
[28] ION SOURCES FOR ACCELERATORS IN MATERIALS RESEARCH
ALTON, GD
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 73 (02): : 221 - 288
[29] Multicharged ion sources for pulsed accelerators
Haseroth, H
Hill, CE
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 945 - 949
[30] Laser ion sources for particle accelerators
Sherwood, TR
LASER INTERACTION AND RELATED PLASMA PHENOMENA, 1996, (369): : 1145 - 1152

← 1 2 3 4 5 →