IDENTIFICATION, ANNIHILATION, AND SUPPRESSION OF NUCLEATION SITES RESPONSIBLE FOR SILICON EPITAXIAL STACKING-FAULTS

被引：85
|
作者：
ROZGONYI, GA
DEYSHER, RP
PEARCE, CW
机构：
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
[2] WESTERN ELECT CO INC,ALLENTOWN,PA 18103
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 12期
关键词：
D O I：
10.1149/1.2132722
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1910 / 1915
页数：6
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