REGIONAL OBSERVABILITY OF A THERMAL-PROCESS

被引：11
|
作者：
JAI, AE
ZERRIK, E
SIMON, MC
AMOUROUX, M
机构：
[1] IMP/CNRS, University of Perpignan, F-66860 Perpignan Cedex, 52, Avenue de Villeneuve
来源：
IEEE TRANSACTIONS ON AUTOMATIC CONTROL | 1995年 / 40卷 / 03期
关键词：
D O I：
10.1109/9.376073
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The realization of a ceramic protector covering a subregion of a substrate and using chemical vapor deposition (cvd) techniques needs the temperature field in the deposition zone to be controlled. A feedback control of this temperature is based on the knowledge of the temperature in the considered subregion. The difficulty occurs because measurements can only be obtained out of the deposition zone. The purpose of this paper is to give an original approach for the reconstruction of the state in the deposition subregion.
引用
收藏
页码：518 / 521
页数：4
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