Comparison of Thin Films of Titanium Dioxide Deposited by Sputtering and Sol–Gel Methods for Waveguiding Applications

被引：0
|
作者：
M. Brella
A. Taabouche
B. Gharbi
R. Gheriani
Y. Bouachiba
A. Bouabellou
H. Serrar
S. Touil
K. Laggoune
M. Boudissa
机构：
[1] Laboratoire de Rayonnement et Plasmas et Physique des Surfaces (LRPPS),
[2] Université Kasdi Merbah,undefined
[3] Thin Films and Interfaces Laboratory,undefined
[4] University of Fréres Mentouri Constantine,undefined
[5] Faculty of Hydrocarbons and Renewable Energies and Earth and Universe Sciences,undefined
[6] University Kasdi Merbah,undefined
[7] Laboratoire Technologie des Matériaux Avancés,undefined
[8] Ecole Nationale Polytechnique de Constantine Malek BENNABI,undefined
[9] Research Center in Industrial Technologies (CRTI),undefined
[10] ENMC Laboratory,undefined
[11] Department of Physics,undefined
[12] Faculty of Sciences,undefined
[13] University Ferhat Abbas,undefined
来源：
Semiconductors | 2022年 / 56卷
关键词：
TiO; thin films; sol–gel; sputtering; anatase; waveguiding;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：234 / 239
页数：5
相关论文
共 50 条
  • [41] Microstructure of nanocrystalline titanium dioxide thin films deposited on silicon
    Domaradzki, J
    Prociow, EL
    Kaczmarek, D
    Mielcarek, W
    ASDAM 2004: THE FIFTH INTERNATIONAL CONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS, 2004, : 119 - 122
  • [42] Electrical Properties and Surface Morphology Study of Titanium Dioxide Thin Films Prepared by Sol Gel Method
    Mamat, M. H.
    Murid, N. A.
    Ismail, S. H.
    Rusop, M.
    INTERNATIONAL CONFERENCE ON ADVANCEMENT OF MATERIALS AND NANOTECHNOLOGY 2007, 2010, 1217 : 266 - +
  • [43] Study of sol-gel derived very thin films of mixed titanium dioxide and vanadium oxide
    Ivanova, T
    Harizanova, A
    Surtchev, M
    Nenova, Z
    PHOTOVOLTAIC AND PHOTOACTIVE MATERIALS - PROPERTIES, TECHNOLOGY AND APPLICATIONS, 2002, 80 : 305 - 308
  • [44] Nanocrystalline titanium carbide thin films deposited by reactive magnetron sputtering
    Musil, J
    Hovorka, D
    Misina, M
    Bell, AJ
    Studnicka, V
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1998, 48 (08) : 963 - 971
  • [45] Preparation of titanium dioxide thin film by sol-gel method
    Chen Nanchun
    Wei Cuimei
    RARE METAL MATERIALS AND ENGINEERING, 2007, 36 : 973 - 976
  • [46] Electron and Atomic Force Microscopy studies of photocatalytic titanium dioxide thin films deposited by DC magnetron sputtering
    Acosta, DR
    Martínez, A
    Magaña, CR
    Ortega, JM
    THIN SOLID FILMS, 2005, 490 (02) : 112 - 117
  • [47] Study of Titanium Dioxide Thin Film by Sol-gel Method
    Nadzirah, Sh.
    Hashim, U.
    Malihah, N.
    MICRO/NANO SCIENCE AND ENGINEERING, 2014, 925 : 278 - +
  • [48] PROPERTIES OF TITANIUM AND ALUMINUM THIN-FILMS DEPOSITED BY COLLIMATED SPUTTERING
    LIU, D
    DEW, SK
    BRETT, MJ
    JANACEK, T
    SMY, T
    TSAI, W
    THIN SOLID FILMS, 1993, 236 (1-2) : 267 - 273
  • [49] TITANIUM NITRIDE THIN-FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING
    GEORGIEV, GP
    POPOV, DN
    PLASMA SURFACE ENGINEERING, VOLS 1 AND 2, 1989, : 587 - 594
  • [50] Erbium photoluminescence in sol-gel derived titanium dioxide films
    Gaponenko, NV
    Sergeev, OV
    Misiewicz, J
    Gnaser, H
    Heiderhoff, R
    Cramer, RM
    Balk, LJ
    Dunbar, A
    Hamilton, B
    EPILAYERS AND HETEROSTRUCTURES IN OPTOELECTRONICS AND SEMICONDUCTOR TECHNOLOGY, 1999, 3725 : 239 - 242
12345