Comparison of Thin Films of Titanium Dioxide Deposited by Sputtering and Sol–Gel Methods for Waveguiding Applications

被引：0
|
作者：
M. Brella
A. Taabouche
B. Gharbi
R. Gheriani
Y. Bouachiba
A. Bouabellou
H. Serrar
S. Touil
K. Laggoune
M. Boudissa
机构：
[1] Laboratoire de Rayonnement et Plasmas et Physique des Surfaces (LRPPS),
[2] Université Kasdi Merbah,undefined
[3] Thin Films and Interfaces Laboratory,undefined
[4] University of Fréres Mentouri Constantine,undefined
[5] Faculty of Hydrocarbons and Renewable Energies and Earth and Universe Sciences,undefined
[6] University Kasdi Merbah,undefined
[7] Laboratoire Technologie des Matériaux Avancés,undefined
[8] Ecole Nationale Polytechnique de Constantine Malek BENNABI,undefined
[9] Research Center in Industrial Technologies (CRTI),undefined
[10] ENMC Laboratory,undefined
[11] Department of Physics,undefined
[12] Faculty of Sciences,undefined
[13] University Ferhat Abbas,undefined
来源：
Semiconductors | 2022年 / 56卷
关键词：
TiO; thin films; sol–gel; sputtering; anatase; waveguiding;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：234 / 239
页数：5
相关论文
共 50 条
  • [1] Comparison of Thin Films of Titanium Dioxide Deposited by Sputtering and Sol-Gel Methods for Waveguiding Applications
    Brella, M.
    Taabouche, A.
    Gharbi, B.
    Gheriani, R.
    Bouachiba, Y.
    Bouabellou, A.
    Serrar, H.
    Touil, S.
    Laggoune, K.
    Boudissa, M.
    SEMICONDUCTORS, 2022, 56 (03) : 234 - 239
  • [2] Comparison of Electrochemical Luminescence Characteristics of Titanium Dioxide Films Prepared by Sputtering and Sol-Gel Combustion Methods
    Park, Hee-Dae
    Sung, Youl-Moon
    Park, Min-Woo
    Song, Jae-Eun
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2013, 52 (05)
  • [3] Tin Dioxide Thin Films Deposited by Sol - Gel Technique
    Ganchev, Maxim
    Katerski, Atanas
    Stankova, Stanka
    Eensalu, Jako Siim
    Terziyska, Penka
    Gergova, Rositsa
    Dikov, Hristosko
    Popkirov, Georgi
    Vitanov, Petko
    10TH JUBILEE CONFERENCE OF THE BALKAN PHYSICAL UNION, 2019, 2075
  • [4] Characterization of transparent conductive ITO thin films deposited on titanium dioxide film by a sol-gel process
    Alam, MJ
    Cameron, DC
    SURFACE & COATINGS TECHNOLOGY, 2001, 142 : 776 - 780
  • [5] Titanium dioxide thin films deposited by the sol-gel technique starting from titanium oxy-acetyl acetonate: gas sensing and photocatalyst applications
    Maldonado, A.
    Mayen-Hernandez, S. A.
    Tirado-Guerra, S.
    Olvera, M. de la L.
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7, NO 9, 2010, 7 (09):
  • [6] Low Loss Sol-Gel TiO2 Thin Films for Waveguiding Applications
    Touam, Tahar
    Znaidi, Lamia
    Vrel, Dominique
    Ninova-Kuznetsova, Iva
    Brinza, Ovidiu
    Fischer, Alexis
    Boudrioua, Azzedine
    COATINGS, 2013, 3 (01): : 49 - 58
  • [7] Tin dioxide sol-gel derived thin films deposited on porous silicon
    Cobianu, C
    Savaniu, C
    Buiu, O
    Dascalu, D
    Zaharescu, M
    Parlog, C
    vandenBerg, A
    Pecz, B
    CAS '96 PROCEEDINGS - 1996 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 19TH EDITION, VOLS 1 AND 2, 1996, : 633 - 636
  • [8] Tin dioxide sol-gel derived thin films deposited on porous silicon
    Inst of Microtechnology, Bucharest, Romania
    Sens Actuators, B Chem, 1-3 (114-120):
  • [9] Comparison of vanadium dioxide films produced via sol-gel and sputtering techniques
    Walker, RE
    Coath, JA
    Richardson, MA
    SOL-GEL OPTICS V, 2000, 3943 : 285 - 289
  • [10] Study of hydrophilicity of titanium dioxide thin films prepared by Sol-Gel method
    Shen, Jie
    Dong, Hao
    Zhang, Yongxi
    Yang, Xiliang
    2000, Science Press (20):
12345