Recent Advances in Machining of Silicon Wafers for Semiconductor Applications

被引：0
|
作者：
P.S. Sreejith
G. Udupa
Y.B.M. Noor
B.K.A. Ngoi
机构：
[1] Precision Engineering Strategic Research Programme,
[2] School of Mechanical and Production Engineering,undefined
[3] Nanyang Technological University,undefined
[4] Nanyang,undefined
[5] Singapore,undefined
来源：
The International Journal of Advanced Manufacturing Technology | 2001年 / 17卷
关键词：
Keywords:Chemical mechanical polishing; Grinding; Roughness; Semiconductor; Silicon wafer; Total thickness variation; Turning;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：157 / 162
页数：5
相关论文
共 50 条
  • [31] RECENT ADVANCES IN SEMICONDUCTOR LASERS
    REDIKER, RH
    IEEE SPECTRUM, 1965, 2 (03) : 44 - &
  • [32] Nanotechnology in machining processes: recent advances
    Reverberi, A. P.
    D'Addona, D. M.
    Bruzzone, A. A. G.
    Teti, R.
    Fabiano, B.
    12TH CIRP CONFERENCE ON INTELLIGENT COMPUTATION IN MANUFACTURING ENGINEERING, 2019, 79 : 3 - 8
  • [33] Machining of biocompatible materials - Recent advances
    Axinte, Dragos
    Guo, Yuebin
    Liao, Zhirong
    Shih, Albert J.
    MSaoubi, Rachid
    Sugita, Naohiko
    CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2019, 68 (02) : 629 - 652
  • [34] Sustainable machining: Recent technological advances
    Shokrani, A.
    Arrazola, P. J.
    Biermann, D.
    Mativenga, P.
    Jawahir, I. S.
    CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2024, 73 (02) : 483 - 508
  • [35] SILICON - KEY TO SEMICONDUCTOR ADVANCES
    BRACKEN, RC
    ELECTRO-TECHNOLOGY, 1969, 83 (05): : 43 - &
  • [36] Magnetic-abrasive machining of silicon wafers a novel approach
    Khomich, M
    Alexeev, Y
    Demmer, A
    Pähler, D
    Dambon, O
    Schneider, U
    INDUSTRIAL DIAMOND REVIEW, 2004, (03): : 45 - +
  • [37] Recent advances and challenges in silicon carbide (SiC) ceramic nanoarchitectures and their applications
    Xu, Man
    Girish, Yarabahally R.
    Rakesh, Kadalipura P.
    Wu, Piye
    Manukumar, Honnayakanahalli M.
    Byrappa, Shayan M.
    Udayabhanu
    Byrappa, Kullaiah
    MATERIALS TODAY COMMUNICATIONS, 2021, 28
  • [38] Recent advances in silicon nitride-based photonic devices and applications
    Fan Zhi-bin
    Chen Ze-ming
    Zhou Xin
    He Xin-tao
    Jiang Shao-ji
    Dong Jian-wen
    CHINESE OPTICS, 2021, 14 (04) : 998 - 1018
  • [39] Recent advances and issues in development of silicon carbide composites for fusion applications
    Nozawa, T.
    Hinoki, T.
    Hasegawa, A.
    Kohyama, A.
    Katoh, Y.
    Snead, L. L.
    Henager, C. H., Jr.
    Hegeman, J. B. J.
    JOURNAL OF NUCLEAR MATERIALS, 2009, 386-88 : 622 - 627
  • [40] Recent advances in amorphous and microcrystalline silicon basis devices for optoelectronic applications
    Hamakawa, Yoshihiro
    Applied Surface Science, 1999, 142 (01): : 215 - 226
12345