Recent Advances in Machining of Silicon Wafers for Semiconductor Applications

被引：0
|
作者：
P.S. Sreejith
G. Udupa
Y.B.M. Noor
B.K.A. Ngoi
机构：
[1] Precision Engineering Strategic Research Programme,
[2] School of Mechanical and Production Engineering,undefined
[3] Nanyang Technological University,undefined
[4] Nanyang,undefined
[5] Singapore,undefined
来源：
The International Journal of Advanced Manufacturing Technology | 2001年 / 17卷
关键词：
Keywords:Chemical mechanical polishing; Grinding; Roughness; Semiconductor; Silicon wafer; Total thickness variation; Turning;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：157 / 162
页数：5
相关论文
共 50 条
  • [21] Surface integrity of silicon wafers in ultra precision machining
    Young, H.T.
    Liao, Hsi-Tien
    Huang, Hong-Yi
    International Journal of Advanced Manufacturing Technology, 2006, 29 (3-4): : 372 - 378
  • [22] High power UV laser machining of silicon wafers
    Corboline, T
    Rea, EC
    Dunsky, C
    FOURTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2003, 5063 : 495 - 500
  • [23] Surface integrity of silicon wafers in ultra precision machining
    Young, H. T.
    Liao, Hsi-Tien
    Huang, Hong-Yi
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2006, 29 (3-4): : 372 - 378
  • [24] Non-traditional machining techniques for silicon wafers
    Daud, Noor Dzulaikha
    Hasan, Md. Nazibul
    Saleh, Tanveer
    Leow, Pei Ling
    Mohamed Ali, Mohamed Sultan
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2022, 121 (1-2): : 29 - 57
  • [25] Recent advances in silicon single photon avalanche diodes and their applications
    Ghioni, Massimo
    Gulinatti, Angelo
    Rech, Ivan
    Cova, Sergio
    2006 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2, 2006, : 719 - +
  • [26] Recent advances in silicon-based nanostructures for thermoelectric applications
    Gordillo, Jose Manuel Sojo
    Morata, Alex
    Sierra, Carolina Duque
    Salleras, Marc
    Fonseca, Luis
    Tarancon, Albert
    APL MATERIALS, 2023, 11 (04):
  • [27] Recent Advances on Thermoelectric Silicon for Low-Temperature Applications
    Narducci, Dario
    Giulio, Federico
    MATERIALS, 2022, 15 (03)
  • [28] Porous Silicon Optical Devices: Recent Advances in Biosensing Applications
    Moretta, Rosalba
    De Stefano, Luca
    Terracciano, Monica
    Rea, Ilaria
    SENSORS, 2021, 21 (04) : 1 - 26
  • [29] Recent advances in graphitic carbon nitride semiconductor: Structure, synthesis and applications
    Vaya, Dipti
    Kaushik, Babita
    Surolia, Praveen K.
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2022, 137
  • [30] Recent Advances in Semiconductor Nanolasers
    Wu, Ming C.
    Lakhani, Amit M.
    2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2012,
12345