Physicochemistry in processes of the formation of functional surfaces of glass and sapphire (α-Al2O3) components for electronics and optical systems in tribochemical polishing

Publications on physicochemical processes of the formation of functional surfaces of glass and sapphire (α-Al2O3) components of electronics and optics have been reviewed. It has been found that to meet the requirements imposed on their surface condition, which should be at the atomic-smooth level, without tribochemical polishing, i.e. physicochemical interaction of the tool and workpiece materials at the final stage of machining, is impossible.