共 50 条
- [31] Challenges of SEM metrology at sub-10 nm METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXVI, PTS 1 AND 2, 2012, 8324
- [32] Challenges for sub-10 nm CMOS devices 2006 INTERNATIONAL WORKSHOP ON NANO CMOS, PROCEEDINGS, 2006, : 125 - 127
- [34] Design with Sub-10 nm FinFET Technologies 2017 IEEE CUSTOM INTEGRATED CIRCUITS CONFERENCE (CICC), 2017,
- [39] Growth of sub-10 nm fluorescent nanodiamonds OPTICAL MATERIALS EXPRESS, 2023, 13 (08) : 2192 - 2202