Structure and Properties of a Bilayer Nanodimensional CoSi2/Si/CoSi2/Si System Obtained by Ion Implantation

被引：0
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作者：
Y. S. Ergashov
B. E. Umirzakov
机构：
[1] Tashkent State Technical University,
来源：
Technical Physics | 2018年 / 63卷
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页码：1820 / 1823
页数：3
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