Formation of gold contact pads on superconducting films by laser ablation

被引：0
|
作者：
I. S. Pozygun
G. M. Seropyan
S. A. Sychev
D. V. Fedosov
机构：
[1] Dostoevsky State University,
来源：
Technical Physics | 2015年 / 60卷
关键词：
Substrate Surface; Gold Film; Plasma Torch; Dielectric Substrate; YBCO Film;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Formation of gold contact pads on dielectric substrates by laser ablation is studied. The mechanical and conductive properties of such contact pads provide a reliable electrical contact between superconducting YBa2Cu3O7 − x (YBCO) films (and YBCO-based structures) and add-on electronic components. The contact pads are formed on the substrate before superconducting film deposition. A high adhesion of the contact pad is provided owing to the deep penetration of laser plasma particles into the substrate.
引用
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页码：306 / 308
页数：2
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