MICROLITHOGRAPHY OF HIGH-TEMPERATURE SUPERCONDUCTING FILMS - LASER ABLATION VS WET ETCHING

被引：16
|
作者：
BALLENTINE, PH [1 ]
KADIN, AM [1 ]
FISHER, MA [1 ]
MALLORY, DS [1 ]
DONALDSON, WR [1 ]
机构：
[1] UNIV ROCHESTER,LASER ENERGET LAB,ROCHESTER,NY 14623
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1989年 / 25卷 / 02期
关键词：
D O I：
10.1109/20.92445
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：950 / 953
页数：4
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