Special issue on Design, Test, Integration and Packaging of MEMS and MOEMS, 2016

被引：0

作者：

Pascal Nouet

Bernd Michel

机构：

[1] LIRMM,

[2] CNRS/University of Montpellier,undefined

[3] Micro Materials Center,undefined

[4] Microsystem Technologies,undefined

来源：

Microsystem Technologies | 2018年 / 24卷

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：361 / 361

共 50 条

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