Design, test, integration and packaging of MEMS/MOEMS, 2006

被引：0

作者：

Michel, B. ^{[2
]}

Courtois, B. ^{[1
]}

机构：

[1] TIMA CMP, F-38031 Grenoble, France

[2] Fraunhofer Inst Reliabil & Microintegrat IZM Berl, D-13355 Berlin, Germany

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 11-12期

关键词：

D O I：

10.1007/s00542-006-0373-y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1449 / 1449

页数：1

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