Design, test, integration and packaging of MEMS/MOEMS, 2006

被引：0
|
作者：
Michel, B. [2 ]
Courtois, B. [1 ]
机构：
[1] TIMA CMP, F-38031 Grenoble, France
[2] Fraunhofer Inst Reliabil & Microintegrat IZM Berl, D-13355 Berlin, Germany
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 11-12期
关键词：
D O I：
10.1007/s00542-006-0373-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1449 / 1449
页数：1
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