Perspective on ultrashort pulse laser micromachining

被引：0
|
作者：
Andreas Tünnermann
Carsten Momma
Stefan Nolte
机构：
[1] Friedrich Schiller University Jena,
[2] Institute of Applied Physics,undefined
[3] Abbe Center of Photonics,undefined
[4] Cortronik GmbH,undefined
[5] Fraunhofer Institute for Applied Optics and Precision Engineering IOF,undefined
[6] Center of Excellence in Photonics,undefined
来源：
Applied Physics A | 2023年 / 129卷
关键词：
Ultrashort pulse laser; Materials processing; Micromachining; Ablation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Ultrashort pulse lasers have found widespread applications in precise micromachining. Here, we present our brief perspective on the development of this innovative technology from the 1990s until today.
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