Perspective on ultrashort pulse laser micromachining

被引：0
|
作者：
Andreas Tünnermann
Carsten Momma
Stefan Nolte
机构：
[1] Friedrich Schiller University Jena,
[2] Institute of Applied Physics,undefined
[3] Abbe Center of Photonics,undefined
[4] Cortronik GmbH,undefined
[5] Fraunhofer Institute for Applied Optics and Precision Engineering IOF,undefined
[6] Center of Excellence in Photonics,undefined
来源：
Applied Physics A | 2023年 / 129卷
关键词：
Ultrashort pulse laser; Materials processing; Micromachining; Ablation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Ultrashort pulse lasers have found widespread applications in precise micromachining. Here, we present our brief perspective on the development of this innovative technology from the 1990s until today.
引用
收藏
相关论文
共 50 条
  • [21] Characterizing focusing units for micromachining with ultrashort laser pulses
    Mekle, Dario
    Hellstern, Julian
    Flamm, Daniel
    Nolte, Stefan
    LASER PLUS PHOTONICS FOR ADVANCED MANUFACTURING, 2024, 13005
  • [22] Ultrashort Pulse Laser Bending
    Dirscherl, Manfred
    Esser, Gerd
    Schmidt, Michael
    JOURNAL OF LASER MICRO NANOENGINEERING, 2006, 1 (01): : 54 - 60
  • [23] Ultrashort pulse laser osteotomy
    Wieger, V.
    Zoppel, S.
    Wintner, E.
    LASER PHYSICS, 2007, 17 (04) : 438 - 442
  • [24] Electron in an Ultrashort Laser Pulse
    Miroslav Pardy
    International Journal of Theoretical Physics, 2003, 42 : 99 - 110
  • [25] Ultrashort Laser Pulse Generation
    Chalus, Olivier
    Biegert, Jens
    EXTREME PHOTONICS AND APPLICATIONS, 2010, : 1 - 18
  • [26] Electron in an ultrashort laser pulse
    Pardy, M
    INTERNATIONAL JOURNAL OF THEORETICAL PHYSICS, 2003, 42 (01) : 99 - 110
  • [27] Laser polishing using ultrashort pulse laser
    Brenner, A.
    Roether, L.
    Osbild, M.
    Finger, J.
    LASER-BASED MICRO- AND NANOPROCESSING XIV, 2020, 11268
  • [28] IONIZATION BY AN ULTRASHORT LASER-PULSE
    ANDREEV, AA
    SEMENOV, VE
    OPTIKA I SPEKTROSKOPIYA, 1995, 78 (04): : 594 - 596
  • [29] Ultrashort-pulse laser calligraphy
    Yang, Weijia
    Kazansky, Peter G.
    Shimotsuma, Yasuhiko
    Sakakura, Masaaki
    Miura, Kiyotaka
    Hirao, Kazuyuki
    APPLIED PHYSICS LETTERS, 2008, 93 (17)
  • [30] Nanospallation induced by an ultrashort laser pulse
    Inogamov, N. A.
    Zhakhovskii, V. V.
    Ashitkov, S. I.
    Petrov, Yu. V.
    Agranat, M. B.
    Anisimov, S. I.
    Nishihara, K.
    Fortov, V. E.
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2008, 107 (01) : 1 - 19
12345