Correction: Modeling and analysis of MEMS capacitive pressure sensors with vertical comb fingers

被引：0
|
作者：
Zhenyu Liu
Yusi Zhu
Lidong Du
Zhan Zhao
Zhen Fang
机构：
[1] Chinese Academy of Sciences,State Key Laboratory of Transducer Technology, Institute of Electronics
[2] University of Chinese Academy of Sciences,undefined
来源：
Microsystem Technologies | 2023年 / 29卷
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摘要：
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页码：807 / 807
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