共 50 条
- [2] TEMPERATURE COMPENSATION IN MEMS CAPACITIVE PRESSURE SENSORS FOR HARSH ENVIRONMENT APPLICATIONS PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2018, VOL 4, 2018,
- [3] Capacitive Pressure Sensors Based on MEMS, Operating in Harsh Environments ICSE: 2008 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2008, : 184 - +
- [5] Multifunctional tool for expanding AFM-based applications Transducers '05, Digest of Technical Papers, Vols 1 and 2, 2005, : 159 - 162
- [6] AFM-based mechanical characterization of single nanofibres NANOSCALE, 2016, 8 (16) : 8414 - 8426
- [8] Mems capacitive humidity sensors based on different structures for low humidity applications 25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023, 2024, 2740