Crystallization of amorphous hydrogenated silicon films deposited under various conditions

被引：0
|
作者：
O. A. Golikova
E. V. Bogdanova
U. S. Babakhodzhaev
机构：
[1] Russian Academy of Sciences,Ioffe Physicotechnical Institute
来源：
Semiconductors | 2002年 / 36卷
关键词：
Silicon; Crystallization; Silane; Magnetic Material; Basic Material;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The possibility of using the magnetron-assisted silane decomposition technique for the deposition of a-Si:H films as the basic materials for the production of polysilicon is analyzed. It is shown how specific features of the film structure affect the crystallization process.
引用
收藏
页码：1180 / 1183
页数：3
相关论文
共 50 条
  • [41] Metal induced crystallization of hydrogenated amorphous silicon
    Yoon, SY
    Kim, KH
    Kim, CO
    Lee, JH
    Jang, J
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1997, 30 : S213 - S216
  • [42] Study of polysilicon produced by solid phase crystallization of hydrogenated amorphous silicon deposited at high rate
    Farhi, G
    Aoucher, M
    Mohammed-Brahim, T
    SOLID STATE PHENOMENA, 1999, 67-8 : 217 - 222
  • [43] CRYSTALLIZATION OF ARSENIC-DOPED HYDROGENATED AMORPHOUS-SILICON DEPOSITED ON GALLIUM-ARSENIDE
    YOKOTA, K
    SAKAGUCHI, M
    UCHIDA, D
    KURODA, T
    TAMURA, S
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (05) : 3084 - 3090
  • [44] CRYSTALLIZATION OF AMORPHOUS SILICON FILMS
    KOSTER, U
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 48 (02): : 313 - 321
  • [45] Time resolved photoluminescence of hydrogenated amorphous silicon carbon thin films deposited by HWCVD
    Swain, B. P.
    Rao, T. K. Gundu
    Dusane, R. O.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (9-20) : 1416 - 1420
  • [46] HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY DC PLANAR MAGNETRON REACTIVE SPUTTERING
    PINARBASI, M
    CHOU, LH
    MALEY, N
    MYERS, A
    LEET, D
    THORNTON, JA
    SUPERLATTICES AND MICROSTRUCTURES, 1987, 3 (04) : 331 - 340
  • [47] Electronic Transport Properties of Hydrogenated Amorphous Silicon Thin Films Deposited on Plastic Substrates
    Li, Yingge
    Du, Dongxing
    ADVANCED POLYMER SCIENCE AND ENGINEERING, 2011, 221 : 189 - +
  • [48] Study on the excimer laser annealed amorphous hydrogenated silicon carbon films deposited by PECVD
    Ambrosone, G.
    Basa, D. K.
    Coscia, U.
    Tresso, E.
    Chiodoni, A.
    Celasco, E.
    Pinto, N.
    Murri, R.
    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 7 NO 3-4, 2010, 7 (3-4): : 770 - 773
  • [49] Laser annealing study of PECVD deposited hydrogenated amorphous silicon carbon alloy films
    Coscia, U.
    Ambrosone, G.
    Gesuele, F.
    Grossi, V.
    Parisi, V.
    Schutzmann, S.
    Basa, D. K.
    APPLIED SURFACE SCIENCE, 2007, 254 (04) : 984 - 988
  • [50] Annealing Temperature Effect on Bismuth Induced Crystallization of Hydrogenated Amorphous Silicon Thin Films
    Zouini, Meriem
    Ouertani, Rachid
    Amlouk, Mosbah
    Dimassi, Wissem
    SILICON, 2022, 14 (05) : 2115 - 2125
12345