The Importance of Taking into Account the Heterogeneous Recombination of Atoms when Studying the Kinetics of Copper Etching in Chlorine Plasma

被引：0

作者：

D. V. Sitanov

S. A. Pivovarenok

D. B. Murin

机构：

[1] Ivanovo State University of Chemistry and Technology,

来源：

High Temperature | 2022年 / 60卷

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摘要：

引用

页码：S146 / S152

共 10 条

[1] The Importance of Taking into Account the Heterogeneous Recombination of Atoms when Studying the Kinetics of Copper Etching in Chlorine Plasma
Sitanov, D. V.
Pivovarenok, S. A.
Murin, D. B.
HIGH TEMPERATURE, 2022, 60 (SUPPL 2) : S146 - S152
[2] Heterogeneous recombination of atoms on aluminum samples in chlorine plasma
Sitanov, D. V.
Pivovarenok, S. A.
HIGH TEMPERATURE, 2017, 55 (03) : 461 - 464
[3] Heterogeneous recombination of atoms on aluminum samples in chlorine plasma
D. V. Sitanov
S. A. Pivovarenok
High Temperature, 2017, 55 : 461 - 464
[4] A study of heterogeneous recombination of chlorine atoms on aluminum and copper surfaces in glow discharge plasma
D. V. Sitanov
S. A. Pivovarenok
High Energy Chemistry, 2017, 51 : 292 - 296
[5] A study of heterogeneous recombination of chlorine atoms on aluminum and copper surfaces in glow discharge plasma
Sitanov, D. V.
Pivovarenok, S. A.
HIGH ENERGY CHEMISTRY, 2017, 51 (04) : 292 - 296
[6] Determination of the rate coefficient for the heterogeneous recombination of chlorine atoms in a plasma reactor by the relaxation technique
Kirillov, YV
Sitanov, DV
HIGH ENERGY CHEMISTRY, 2004, 38 (03) : 203 - 206
[7] Determination of the Rate Coefficient for the Heterogeneous Recombination of Chlorine Atoms in a Plasma Reactor by the Relaxation Technique
Yu. V. Kirillov
D. V. Sitanov
High Energy Chemistry, 2004, 38 : 203 - 206
[8] Determination of the probability of the heterogeneous recombination of chlorine atoms on the construction materials of plasma chemical reactors
Iventichev M.Yu.
Sitanov D.V.
Svettsov V.I.
Russian Microelectronics, 2011, 40 (5) : 316 - 320
[9] THE RECOMBINATION OF COPPER ATOMS IN GERMANIUM AT 3 LEVELS TAKING INTO ACCOUNT THE STATISTICS OF THE FILLING OF THESE LEVELS BY ELECTRONS
MASHOVETS, TV
SOVIET PHYSICS-TECHNICAL PHYSICS, 1958, 3 (06): : 1062 - 1070
[10] KINETICS AND MECHANISM OF HETEROGENEOUS HOMOGENEOUS CHLORINATION OF METHANE .2. POSSIBILITY OF USING KINETICS OF HETEROGENEOUS RECOMBINATION OF CHLORINE ATOMS TO DISCRIMINATE MECHANISMS OF CHAIN GENERATION
AGLULIN, AG
IVANOVA, RA
SNAGOVSKII, YS
KINETICS AND CATALYSIS, 1991, 32 (03) : 465 - 468

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