Determination of the rate coefficient for the heterogeneous recombination of chlorine atoms in a plasma reactor by the relaxation technique

The relaxation technique was used to study the recombination kinetics of atoms in a chlorine plasma. It was revealed that time changes in the parameters of electronegative- and electropositive-gas plasmas under the conditions of pulsed discharge firing differed in character. A procedure was proposed for the treatment of experimental data with the aim of determining the rate coefficient for heterogeneous recombination of chlorine atoms under pulsed discharge excitation. A numerical value for the coefficient of heterogeneous recombination of chlorine atoms on glass was obtained for pure chlorine and chlorine-oxygen plasmas.