Determination of the probability of the heterogeneous recombination of chlorine atoms on the construction materials of plasma chemical reactors

被引：2

作者：

Iventichev M.Yu. ^{[1
]}

Sitanov D.V. ^{[1
]}

Svettsov V.I. ^{[1
]}

机构：

[1] Ivanovo State University of Chemistry and Technology, Ivanovo 153000

来源：

Russian Microelectronics | 2011年 / 40卷 / 5期

关键词：

Current Pulse; RUSSIAN Microelectronics; Discharge Tube; Stainless Steel Sample; Ultraviolet Lamp;

D O I：

10.1134/S1063739711050040

中图分类号：

学科分类号：

摘要：

Atomic recombination in chlorine plasma on the surface of the plasma chemical reactor made from molybdenum glass and in the presence of stainless-steel samples is investigated using the relaxation pulsed procedure jointly with absorption spectroscopy. Rate constants and probabilities of heterogeneous annihilation of chlorine atoms on glass and stainless steel are determined experimentally. © 2011 Pleiades Publishing, Ltd.

引用

页码：316 / 320

页数：4

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