Temperature Dependences of the Sputtering of Negative Silicon Cluster Ions

被引：0
|
作者：
B. G. Atabaev
R. Dzabbarganov
F. R. Yuzikaeva
M. A. Permukhamedova
Z. Sh. Shaymardanov
A. S. Khalmatov
机构：
[1] Arifov Institute of Ion-Plasma and Laser Technologies,
[2] Academy of Sciences of Uzbekistan,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
sputtering; secondary-ion mass spectrometry; cluster; silicon; emission; negative ion; energy threshold;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：S413 / S415
相关论文
共 50 条
  • [21] REACTIVE ETCHING OF POSITIVE AND NEGATIVE SILICON CLUSTER IONS BY NITROGEN-DIOXIDE
    MANDICH, ML
    BONDYBEY, VE
    REENTS, WD
    JOURNAL OF CHEMICAL PHYSICS, 1987, 86 (07): : 4245 - 4257
  • [22] Cluster size and velocity dependences of sputtering and secondary ion emission under gold cluster impact
    Wehbe, N.
    Fallavier, M.
    Della Negra, S.
    Depauw, J.
    Brunelle, A.
    Andersen, H. H.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2010, 268 (17-18): : 2596 - 2602
  • [23] CHEMISTRY OF SILICON CLUSTER IONS
    JARROLD, MF
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1991, 201 : 109 - PHYS
  • [24] Sputtering of elemental metals by Ar cluster ions
    Matsuo, J
    Toyoda, N
    Akizuki, M
    Yamada, I
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 121 (1-4): : 459 - 463
  • [25] Indium sputtering upon bombardment with cluster ions
    S. N. Morozov
    U. Kh. Rasulev
    Bulletin of the Russian Academy of Sciences: Physics, 2012, 76 (5) : 511 - 515
  • [26] Preferential Sputtering of Alloys by Gas Cluster Ions
    Chernysh, V. S.
    Ieshkin, A. E.
    Kireev, D. S.
    Minnebaev, D. K.
    Skryleva, E. A.
    Senatulin, B. R.
    TECHNICAL PHYSICS, 2024, 69 (02) : 160 - 168
  • [27] ON THE SPECTRAL AND TEMPERATURE DEPENDENCES OF THE QUANTUM YIELD IN SILICON
    VAVILOV, VS
    BRITSYN, KI
    SOVIET PHYSICS-SOLID STATE, 1960, 1 (10): : 1489 - 1490
  • [28] Negative cluster ions in sputtering of Si, SiC and graphite: Abundance distributions, energy spectra and fragmentation precesses
    Gnaser, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 164 : 705 - 714
  • [29] SPUTTERING YIELDS OF NEGATIVE HYDROGEN-IONS
    GREER, JA
    SEIDL, M
    AIP CONFERENCE PROCEEDINGS, 1984, (111) : 220 - 226
  • [30] SOURCE OF NEGATIVE-IONS BY CS SPUTTERING
    BILLEN, JH
    GRASSI, CM
    RICHARDS, HT
    RIEDHAUSER, S
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (07): : 936 - 936
12345