Precision alignment of pulse stage using moire signals

被引：0
|
作者：
Liu, JN [1 ]
Zhou, LZ [1 ]
Uchida, H [1 ]
Kono, A [1 ]
Sharma, R [1 ]
Chitnis, VT [1 ]
Furuhashi, H [1 ]
Uchida, Y [1 ]
机构：
[1] Southeast Univ, Nanjing 210096, Peoples R China
来源：
SICE 2002: PROCEEDINGS OF THE 41ST SICE ANNUAL CONFERENCE, VOLS 1-5 | 2002年
关键词：
D O I：
暂无
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A simple and high accuracy optical intelligent alignment system using a position sensor of a diffraction grating is proposed by our Asian group. From a simulation of this system using a permeation type diffraction grating, we can conclude that it is possible to improve the wide position definition-from +/- 0.25mm to proves 12mum with the precision accuracy of +/- 4nm..
引用
收藏
页码：382 / 385
页数：4
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