Precision alignment of pulse stage using moire signals

被引：0

作者：

Liu, JN ^{[1
]}

Zhou, LZ ^{[1
]}

Uchida, H ^{[1
]}

Kono, A ^{[1
]}

Sharma, R ^{[1
]}

Chitnis, VT ^{[1
]}

Furuhashi, H ^{[1
]}

Uchida, Y ^{[1
]}

机构：

[1] Southeast Univ, Nanjing 210096, Peoples R China

来源：

SICE 2002: PROCEEDINGS OF THE 41ST SICE ANNUAL CONFERENCE, VOLS 1-5 | 2002年

关键词：

D O I：

暂无

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A simple and high accuracy optical intelligent alignment system using a position sensor of a diffraction grating is proposed by our Asian group. From a simulation of this system using a permeation type diffraction grating, we can conclude that it is possible to improve the wide position definition-from +/- 0.25mm to proves 12mum with the precision accuracy of +/- 4nm..

引用

页码：382 / 385

页数：4

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